| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction table with improved maintainability and a longer service life. SOLUTION: It is not necessary to replace a whole moving table 13, when the surface (a substrate W mounted surface) of the moving table 13 used as the suction table on which the substrate W is mounted is deteriorated owing to abrasion or the like, and a suction hole plate 22 is replaceable with a new one 22, i.e., negative pressure generated between a suction groove 41 exclusively for the suction hole plate and a suction groove 27 for sucking the substrate in the base plate 21 is released, establishing a condition that the base plate 21 suctions and holds the suction hole plate 22 is released, and only the suction hole plate 22 is replaced to finish the replacement. As a result, the excellent moving table is obtained wherein the maintainability is improved through the easier replacement of the suction hole plate 22, the performance is kept at a low cost, and the long service life is obtained. COPYRIGHT: (C)2004,JPO
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