发明名称 Diffraction tomography for monitoring latent image formation
摘要 A system and method of reconstructing an image of a structure having periodic variations in index of refraction. Electromagnetic waves are projected onto the structure and the resulting diffracted electromagnetic waves are measured, wherein the step of measuring includes the step of determining a plurality of intensities DE. Refractive terms can then be calculated as a function of the intensities DE.
申请公布号 US6658144(B1) 申请公布日期 2003.12.02
申请号 US19980083447 申请日期 1998.05.22
申请人 MICRON TECHNOLOGY, INC. 发明人 HATAB ZIAD R.
分类号 G01N23/20;G06T5/00;G06T7/00;G06T11/00;(IPC1-7):G06K9/46;G06T7/60 主分类号 G01N23/20
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