| 发明名称 |
TRENCH MOS RESURF SUPER-JUNCTION DEVICES |
| 摘要 |
A RESURF super-junction device (51) is provided which comprises a plurality of electrodes (53) disposed in a layer of a first material (61) having a first conductivity type. Each of the plurality of electrodes contains a second material (57) of a second conductivity type which is encased in a dielectric material (55). |
| 申请公布号 |
AU2003225114(A1) |
申请公布日期 |
2003.12.02 |
| 申请号 |
AU20030225114 |
申请日期 |
2003.04.23 |
| 申请人 |
MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE |
发明人 |
VISHNU KHEMKA;RONGHUA ZHU;AMITAVA BOSE;VIJAY PARTHASARTHY |
| 分类号 |
H01L29/06;H01L29/40;H01L29/78;H01L29/861 |
主分类号 |
H01L29/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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