| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device which does not disturb the laminar flow of a down flow inside a down flow system clean room without causing a turbulence by a cup cover near the cup cover, when the cup cover of a spin coater device installed inside the clean room moves vertically. <P>SOLUTION: In the spin coater for a color filter which has a dome-type cup cover comprising a cup cover region having the function of opening/closing the interior of a coater cup, provided on the upper face of the coater cup and a resist coating region having the function of drip-coating a resin resist on the upper face of a substrate, a foreign substance is prevented from being included into the coater cup by molding the cup cover into a dome shape. <P>COPYRIGHT: (C)2004,JPO |
