DEVICE FOR LINEARLY MOVING WAFER CASSETTE USED IN SEMICONDUCTOR FABRICATION PROCESS

摘要

PURPOSE: A device for linearly moving a wafer cassette is provided to prevent the torsion of an arm by linearly moving the wafer cassette along a linear guide rail. CONSTITUTION: A device for linearly moving a wafer cassette is composed of a cylindrical support unit(10) rotatably installed, a linear guide rail mounted at the cylindrical support unit, a power transmission unit(30) mounted at one end of the guide rail, and a table(40) movably mounted at the linear guide rail. A ball screw is mounted at the top of the linear guide rail. The power transmission unit is connected to the ball screw, and rotates the ball screw.