| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin treating device for preventing inflow of turbulent flow into a cup body even when the turbulent flow is generated in a treating tank. SOLUTION: The spin treating device is provided with a treating tank 1, a cup body 2 provided in the treating tank and having an opening on the upper surface of the same, a turn table 16 driven to turn while retaining a substrate provided in the cup body, a fan filter unit 32 provided in the upper part of the treating tank to introduce clean air into the treating tank, a discharging pipe 5 for discharging the clean air supplied into the treating tank from the fan filter unit through an internal space in the cup body, and an annular wall body 23 provided at the peripheral part of the opening on the upper surface of the cup body to preclude the inflow of air in the outside of the cup body into the cup body through the opening. COPYRIGHT: (C)2004,JPO
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