| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for performing X-ray analysis on a microregion through the use of a pseudo contact type capillary and its apparatus capable of generating a fine beam by a simple method and performing X-ray analysis on the microregion in a sample by the fine beam. SOLUTION: When the X-ray analysis is performed on the microregion through the use of the pseudo contact type capillary, by narrowing an X-ray beam 2 by a conical aperture 4 having a fine hole 5 and bringing the conical apearture 4 close to the surface of the sample 6, it is possible to suppress the widening of and a reduction in the intensity of the X-ray beam 2 after its passage through the conical apearture 4 to perform the X-ray analysis on the microregion in the sample 6. COPYRIGHT: (C)2004,JPO
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