SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of improving workability and quality of liquid process. SOLUTION: A glass dry plate W is horizontally held by a holding mechanism 6 suspended from an arm 7, and submerged in a developer pooled in a liquid pooling part 4, for example a developer reservoir vessel 1. A connection mechanism 8 connects the holding mechanism 6 with the arm 7 so that the holding mechanism 6 is free to swing. COPYRIGHT: (C)2004,JPO