ADJUSTABLE THREE-DIMENSIONAL CAPACITOR

摘要

PROBLEM TO BE SOLVED: To provide an adjustable capacitor used for an LC or RC matching network in a micro-circuit. SOLUTION: A set of individual capacitors having a bottom portion electrode in common for them are formed. The areas of the top portion electrodes of the individual capacitors are so selected as to have their integer ratio to each other. Thereby, they can be so combined as to produce arbitrary capacitance within the scope of a unit values. For example, when providing the four capacitors whose areas have such ratio to each other as 5:2:1:1, arbitrary capacitors whose capacitance fall in the scope ranging from 1 to 9 can be generated depending on how their top portion electrodes are connected with the common bottom portion electrode. Such connections are performed in a wire-bonding mode at the final wiring level for providing an factory adjustable capacitor. Alternatively, such connections can be performed in a site via a programmable apparatus in order to provide in the field programmable capacitors. The process for manufacturing the device is also explained. COPYRIGHT: (C)2004,JPO