| 摘要 |
PURPOSE: A cooling apparatus of a semiconductor wafer is provided to shorten the cooling time and to improve cooling efficiency. CONSTITUTION: A cooling apparatus comprises a processing chamber(10) for performing a cooling process, an air supply line(18) for supplying clean air into the processing chamber, a fan(24) located on the processing chamber for pumping forcibly the clean air, a guide rail(12) located at outside of the processing chamber, and a table(14) for loading a cooling object substance. The cooling apparatus further includes an ion generator(20) formed on the air supply line, a temperature sensor(22) for measuring the temperature of the cooling object substance, and an alarm lamp(26).
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