发明名称 MACHINING METHOD OF BRITTLE MATERIAL
摘要 PROBLEM TO BE SOLVED: To easily separate a brittle material bonded on a hard plate and avoid cracks or damages on the same upon separation. SOLUTION: The brittle material 10 is bonded onto the hard plate 11 through an adhesive double coated sheet 12, equipped with adhesive agent layers 15, 15' on both surfaces of the same, to form a unit U. Thereafter, the unit U is dipped in a liquid L, in which an adhesive agent is insoluble or hardly dissolved, to impregnate the liquid L into an interface between the adhesive double coated sheet 12 and the brittle material 10 or impregnate the liquid L into an interface between the adhesive double coated sheet 12 and the hard plate 11. Thereafter, the brittle material 10 is separated from the end part of the unit U. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003338475(A) 申请公布日期 2003.11.28
申请号 JP20020147552 申请日期 2002.05.22
申请人 LINTEC CORP 发明人 NAGAMOTO KOICHI;HORIGOME KATSUHIKO;SENOO HIDEO
分类号 B24B37/30;H01L21/301;H01L21/304;(IPC1-7):H01L21/304;B24B37/04 主分类号 B24B37/30
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