THIN FILM TYPE HUMIDITY SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A thin film type humidity sensor and a manufacturing method thereof are provided to use the thin film type humidity sensor for a long time by preventing the thin film type humidity sensor from being contaminated. CONSTITUTION: A resistance pattern(32) and a micro-heater(33) are formed on an upper surface of a silicon substrate(31). Then, an inorganic material humidity sensing layer(34) is formed on upper surfaces of the resistance pattern(32) and the micro-heater(33). After that, a lower portion of the inorganic material humidity sensing layer(34) and a lower surface of the substrate(31) aligned at a peripheral portion of the inorganic material humidity sensing layer(34) are removed through an etching process. The inorganic material humidity sensing layer(34) is formed on the substrate through a spin coating process, a dip coating process, or a dispensing process.