| 摘要 |
The rectangular semiconductor substrate (10) has four sides (10a), an active front surface (11) and a rear surface (12), each with crystallographic orientation 110. Each of the four sides includes an angle of 45degrees with the 110 orientation, which lies parallel to the active surface. The substrate (10) has a membrane (14) at the active surface, formed by a depression (13) made into the rear surface. The membrane includes measurement resistances (Rc1, Rc2, Rs1, Rs2). Pressure is measured from the alteration in these resistances.
|
