发明名称 PULSE POWER CIRCUIT, DISCHARGE LIGHT SOURCE USING IT, AND ITS DRIVING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a pulse power source which conducts preliminary ionization prior to main discharge by an easy and convenient circuit. SOLUTION: This pulse power source is provided with a main discharge circuit and a preliminary ionization circuit, and the preliminary ionization circuit has a magnetic switch which makes use of a saturable reactor connected to the main discharge circuit in series. Owing to this structure, it is not necessary to provide a preliminary ionization circuit separately, the structure of the circuit becomes simple, the synchronization of the main discharge and the preliminary ionization discharge is conducted automatically, and the preliminary ionization discharge is positively carried out even in a high repetition rate operation. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003338649(A) 申请公布日期 2003.11.28
申请号 JP20020147165 申请日期 2002.05.22
申请人 RIKOGAKU SHINKOKAI 发明人 HOTTA HIDEYOSHI;NISHIKAWA KEIICHIRO
分类号 H05B41/34;H01L21/027;H01S3/097;H01S3/0977;H02M9/04;(IPC1-7):H01S3/097 主分类号 H05B41/34
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