SUBSTRATE HOLDER FOR MANUFACTURING CHEMICAL COMPOUND SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a substrate holder for manufacturing a chemical compound semiconductor capable of repeating film-forming continuously, with no warping due to thermal strain even if a compound semiconductor film sticks to the surface. SOLUTION: A substrate holder 10 for manufacturing a chemical compound semiconductor comprises on its surface a substrate holding recess 12 that holds a compound semiconductor crystal substrate 13 and is heated by the heat from a heater provided on a rear side. A plurality of deformation preventing grooves 15 are formed at a part of the surface of the substrate holder except for the substrate holding recess. COPYRIGHT: (C)2004,JPO