发明名称
摘要 1,231,644. Etching. WESTERN ELECTRIC CO. Inc. 16 May, 1968 [19 May, 1967], No. 23217/68. Heading B6J. [Also in Division G2] A germanium support coated with a silicon dioxide layer and an exposed and developed resist (see Division G2) is etched with an aqueous solution containing ammonium fluoride and hydrofluoric acid which etches the silicon dioxide at 500 Š per minute.
申请公布号 GB1231644(A) 申请公布日期 1971.05.12
申请号 GBD1231644 申请日期 1968.05.16
申请人 发明人
分类号 G03C1/93;G03F7/075 主分类号 G03C1/93
代理机构 代理人
主权项
地址