| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an abrasive which can remove an excessive metal film from an insulation film on which a metal such as tungsten, aluminum, and copper is wired, and flatten the insulation film having the metal wiring without damaging it and a method for polishing by using the abrasive. <P>SOLUTION: The abrasive comprises: an organic/inorganic composite particles produced by neutralizing organic fine particles dispersed in water with an alkaline substance and swelling them, and bonding inorganic fine particles or the precursor thereof with a smaller average particle size than that of the organic fine particles to the surface or cavities of the swollen organic fine particles; and water. <P>COPYRIGHT: (C)2004,JPO</p> |
