| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem of structure of a conventional fluid circulating supplying device, in which, since the abnormality is detected in case leakage occurs in a circulation path outside the device, there is a possibility that a body to be cooled is excessively heated and is damaged, and thereby an additional means such as a sensor for detecting the leakage to protect the body to be cooled is required. SOLUTION: In the fluid circulating supplying device having a circulation means for circulating fluid and the circulation path, a fluid flow rate detection means is installed on a return path side of the circulation path. COPYRIGHT: (C)2004,JPO |
