DEVICE FOR HOLDING OPTICAL SYSTEM, METHOD OF POSITIONALLY ADJUSTING OPTICAL DEVICE, LENS BARREL, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a device for holding an optical system and a lens barrel for the optical system by which the optical device is easily and accurately positioned and also a part of the optical device is positionally adjusted in the midst of working, and to provide a method of positionally adjusting the optical device by which exposing accuracy is improved, an exposure device, and a method of manufacturing the device. SOLUTION: An image surface side lens 39a arranged at a lower part than a flange part 38a in the lens barrel 38 is held in an image surface side lens barrel module 37a through a fixed optical device holding device capable of positionally adjusting the lens at the time of attaching and keeping a specified set position at all times. A movable lens 39bm and a still lens arranged at an upper part than the flange part 38a in the lens barrel 38 are held in an object surface side lens barrel module 37b through a movable optical device holding device 40 capable of positionally adjusting the lens 39bm based on a signal from the outside in the midst of the working of the exposure device 31. The lens barrel 38 of a projection optical system 35 is constituted by piling up the several modules 37a and 37b. COPYRIGHT: (C)2004,JPO