| 摘要 |
PROBLEM TO BE SOLVED: To prevent pollution of high-purity sample gas introduced in a cell and then to seal the gas in the cell in a high pressure state, by completely removing internal residual gas in the cell, a sealing device, and a pipe system. SOLUTION: The cell 1 in which the gas is charged is installed in an airtight manner to a sealing device body 3, and a base plate 12 is fixed in an airtight manner to a face of the sealing device body 3, and a push rod 15 for operation of sealing the cell 1 is inserted to be movable in the sealing device body 3 through the center of the base plate 12. A roto-variseal 10 and an O-ring 16 keep the airtightness among the push rod 15, sealing device body 3, and base plate 12. Vacuum sucking of the sealing device body 3 and the cell 1 is performed through a gas supply port 11', and the vacuum sucking of a sealed portion of the base plate 12 and the push rod is performed through a discharge port 13', by using a evacuation device 18. The evacuation device 18 can completely remove the internal residual gas. Then, the high-purity sample gas is supplied with high pressure state to the cell 1, and a set screw 7 is screwed into the cell 1 by the push rod 15 to sandwich a hollow metal O-ring 5 between a seal chip 6 and the cell 1. Accordingly, the sample gas is sealed with a high pressure state in the cell 1. COPYRIGHT: (C)2004,JPO
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