| 摘要 |
PROBLEM TO BE SOLVED: To provide an FFU assembling structure wherein an FFU is easily and sufficiently airtightly attached from the lower part of a filter frame. SOLUTION: This FFU assembling structure is provided with a frame member formed by disposing a long member and a short member in the ceiling side of a clean room into a grid shape, and the FFU formed by assembling the fan unit to the filter unit. The frame member is provided with a hollow box cross sectional body part, an upper part flange part provided in the upper part of the body part, and a lower part flange part provided in the lower part of the body part and having the width narrower than that of the upper flange part. The FFU is characterized in having a gasket attached in the circumference of the fan unit, being inserted to the frame member from the lower side of the frame member, abutting on the upper part flange part of the frame member via the gasket, and having the filter unit supported and fixed to the support plate member provided in the lower part flange part side of the frame member. COPYRIGHT: (C)2004,JPO
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