| 摘要 |
PROBLEM TO BE SOLVED: To provide a fan filter device responding to a request for a large air capacity while suppressing the height in the vertical direction of a blowing surface to low. SOLUTION: The approximately rectangular parallelepiped inner space of the fan filter device 10 is partitioned into a filter space 25 and a fan space 27 by a vertical partition wall 26. The filter space 25 stores a HEPA (high- efficiency particulate air) filter 18 and the fan space 27 is disposed with a plurality of sirocco fans 16, and a connecting duct 24 for connecting a housing outlet part 16c of each sirocco fan 16 to the opening part 26a formed in the partition wall 26 is also provided. The air fed from each sirocco fan 16 passes through the connecting duct 24, is fed to an upper surface space 25a of the HEPA filter 18, passes the HEPA filter 18 from the upper surface side to the lower surface side to be cleaned and delivered from a delivery port 14 in the bottom surface of a lower case 12. COPYRIGHT: (C)2004,JPO
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