SEMICONDUCTOR DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To test in a bated a large region of an electrode pad of a test body in an electrical characteristic test process that is one of semiconductor manufacturing processes. SOLUTION: The electrical characteristic test is performed by pressing a testing structure to a test body using a magnetic force. The testing structure is formed with electrically independent protrusions whose number is equal to that of test target conductors formed in a region targeted for the test of the test body. COPYRIGHT: (C)2004,JPO