发明名称 |
METHOD FOR PRODUCING SILICON CARBIDE NANOWIRES |
摘要 |
PURPOSE: Provided is a method for producing a silicon carbide nanowire having high purity, high density and excellent crystallinity, which is useful as a nano electric material and an electronic device material, by simple processing steps. CONSTITUTION: The method for producing a silicon carbide nanowire comprises the steps of: dissolving an iron salt into a polar solvent and coating the solution on a silicone substrate; introducing the coated silicone substrate into a reaction furnace, positioning a quartz boat in which gallium metal and gallium nitride are contained, near the substrate and heating the reaction furnace; and injecting methane gas and hydrogen gas into the reaction furnace after the temperature of the reaction furnace is reached to 1000-1200 deg.C, and then cooling it to room temperature.
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申请公布号 |
KR20030090427(A) |
申请公布日期 |
2003.11.28 |
申请号 |
KR20020028728 |
申请日期 |
2002.05.23 |
申请人 |
PARK, JEUNG HEE;YANG, HYUN IK |
发明人 |
KIM, HWA YEONG;PARK, JEUNG HEE;YANG, HYUN IK |
分类号 |
B82B3/00;(IPC1-7):B82B3/00 |
主分类号 |
B82B3/00 |
代理机构 |
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