发明名称 METHOD FOR PRODUCING SILICON CARBIDE NANOWIRES
摘要 PURPOSE: Provided is a method for producing a silicon carbide nanowire having high purity, high density and excellent crystallinity, which is useful as a nano electric material and an electronic device material, by simple processing steps. CONSTITUTION: The method for producing a silicon carbide nanowire comprises the steps of: dissolving an iron salt into a polar solvent and coating the solution on a silicone substrate; introducing the coated silicone substrate into a reaction furnace, positioning a quartz boat in which gallium metal and gallium nitride are contained, near the substrate and heating the reaction furnace; and injecting methane gas and hydrogen gas into the reaction furnace after the temperature of the reaction furnace is reached to 1000-1200 deg.C, and then cooling it to room temperature.
申请公布号 KR20030090427(A) 申请公布日期 2003.11.28
申请号 KR20020028728 申请日期 2002.05.23
申请人 PARK, JEUNG HEE;YANG, HYUN IK 发明人 KIM, HWA YEONG;PARK, JEUNG HEE;YANG, HYUN IK
分类号 B82B3/00;(IPC1-7):B82B3/00 主分类号 B82B3/00
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