发明名称 METHOD FOR PRODUCING CERIUM-BASED POLISHING MATERIAL AND CERIUM-BASED POLISHING MATERIAL PRODUCED BY SAID METHOD
摘要 <p>A method for producing a cerium-based polishing material having a step of pulverizing a raw material for a cerium-based polishing material, a step of firing the pulverized raw material, and a step of subjecting the fired raw material to a wet treatment, characterized in that it further comprises, after the wet treatment, a low temperature refiring step of heating the wet treated raw material at 200 to 700 °C. A polishing material having particularly preferred characteristics can be produced by a method still further comprising a step of fully drying the raw material after the wet treatment and subjecting the dried raw material to the low temperature refiring step.</p>
申请公布号 WO2003097761(P1) 申请公布日期 2003.11.27
申请号 JP2003005890 申请日期 2003.05.12
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