| 发明名称 |
METHOD FOR PROCESSING ELECTRICAL PARTS, PARTICULARLY FOR PROCESSING SEMICONDUCTOR CHIPS AND ELECTRICAL COMPONENTS, AND DEVICE FOR CARRYING OUT SAID METHOD |
| 摘要 |
The invention relates to a novel method for processing electrical parts, particularly for processing semiconductor chips and electrical components, and a device for carrying out the inventive method. |
| 申请公布号 |
WO03098665(A1) |
申请公布日期 |
2003.11.27 |
| 申请号 |
WO2003DE01152 |
申请日期 |
2003.04.09 |
| 申请人 |
SILLNER, GEORG, RUDOLF |
发明人 |
SILLNER, GEORG, RUDOLF |
| 分类号 |
H01L21/50;H01L21/00;H01L21/683 |
主分类号 |
H01L21/50 |
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