| 摘要 |
<p>A device for measuring in three dimensions a topographical shape of an object. The device comprises an arrayed confocal imaging system having a confocal topographical mask provided for converting light produced by a light source into an array of small spots. The mask being mounted on a scanning member provided for moving the mask over successive positions over a predetermined distance. The device further comprises a confocal objective provided for mapping at successive object-position-in-focus the array of small spots output at said successive positions. The confocal objective may be mounted at a fixed position within said device.</p> |
