发明名称 WASHING METHOD AND WASHING DEVICE
摘要 <p>A washing method and a washing device capable of increasing a washing effect by washing parts with recessed structures by using a liquefied gas or a supercritical fluid medium, the method comprising the step of removing at least deposit adhered to the surfaces of the recessed structures of the parts (31) with the recessed structures, wherein washing is performed by using the supercritical gas or liquefied gas so that the washing medium can be distributed to the surfaces of the recessed structures.</p>
申请公布号 WO2003097258(P1) 申请公布日期 2003.11.27
申请号 JP2003005870 申请日期 2003.05.12
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