ENHANCED PHOTO-EMF SENSOR WITH HIGH BANDWIDTH AND LARGE FIELD OF VIEW
摘要
A photo-EMF sensor and a method of making same has a substrate with a semiconducting layer; a plurality of sensing regions in the layer, each sensing region including (i) a pair of electrodes disposed in, on or above the layer and (ii) an active region in the layer disposed adjacent said pair of electrodes; and a plurality of inactive regions in said the arranged between adjacent sensing regions. The inactive regions and the sensing regions are dosed with a desensitizing agent, the inactive regions receiving a relatively higher dose of the desensitizing agent and the sensing regions receiving a relatively lower dose of the desensitizing agent. The active layer is preferably placed in a monolithic Fabry-Perot cavity to enhance the optical efficiency and performance of the sensor.
申请公布号
WO03067676(A3)
申请公布日期
2003.11.27
申请号
WO2002US30609
申请日期
2002.09.25
申请人
HRL LABORATORIES, LLC;PEPPER, DAVID, M.;KLEIN, MARVIN, B.;NOLTE, DAVID;DUNNING, GILMORE, J.
发明人
PEPPER, DAVID, M.;KLEIN, MARVIN, B.;NOLTE, DAVID;DUNNING, GILMORE, J.