| 摘要 |
Compatibility of a small spring constant and large supporting load is realized, so that a stable operation is assured even if a fine-movement linear motor fails. A supporting unit, having a plurality of magnets whose same poles are arranged facing each other, is adapted to support the self-weight of a top plate on which an object to be positioned is mounted, using a repulsive force in a direction orthogonal to the facing direction of the plurality of magnets. In a characteristic curve representing the relationship between the floating force and displacement in a floating direction, the tangent inclination when the object is at a first position in the floating direction is negative, and the relationship of floating force<the self-weight holds when the object is at a second position lower than the first position.
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