发明名称 USING STABILIZERS IN ELECTROLESS SOLUTIONS TO INHIBIT PLATING OF FUSES
摘要 The present invention relates to a method of forming a metal feature on an intermediate structure of a semiconductor device that comprises a first exposed metal structure and a second exposed metal structure. The metal feature is selectively formed on the first exposed metal structure without forming on the second exposed metal structure. By adjusting a concentration of stabilizer in an electroless plating solution, the metal feature is electrolessly plated on the first exposed metal structure without plating metal on the second exposed metal structure.
申请公布号 US2003219976(A1) 申请公布日期 2003.11.27
申请号 US20020154755 申请日期 2002.05.24
申请人 GLEASON JEFFERY N. 发明人 GLEASON JEFFERY N.
分类号 C23C18/16;C23C18/31;H01L21/288;H01L23/525;(IPC1-7):H01L23/58;H01L21/44 主分类号 C23C18/16
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