| 摘要 |
A failure analysis method is provided that allows high-precision failure mode classification. Based on the result of a predetermined test using an LSI tester (2), an original FBM (27a) is generated. The FBM (27a) is compressed with 8x8 bits per pixel to generate an FBM (27b). Based on the FBM (27b), an area where a failure bit exists in the FBM (27a) is determined. Then, by compressing a portion of the FBM (27a) which corresponds to the above area with 2x2 bits per pixel, FBMs (27c, 27d) are generated. Based on the FBMs (27c, 27d), failure bits are determined.
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