发明名称 |
Film bulk acoustic resonator (FBAR) device and method for fabricating the same |
摘要 |
Disclosed are a film bulk acoustic resonator (FBAR) device and a method for fabricating the film bulk acoustic resonator (FBAR) device. The film bulk acoustic resonator (FBAR) device comprises a membrane layer having a plurality of active regions and provides different resonant frequencies by providing different thicknesses of the active regions of series resonators and shunt resonators, and by controlling the thicknesses, respectively. A plurality of the film bulk acoustic resonator (FBAR) devices having different resonant frequencies are manufactured on a substrate, thereby simultaneously manufacturing a transmission filter and a reception filter on the same substrate. Further, the film bulk acoustic resonator (FBAR) device has a stable structure and excellent characteristics.
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申请公布号 |
US2003218518(A1) |
申请公布日期 |
2003.11.27 |
申请号 |
US20020327929 |
申请日期 |
2002.12.26 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
LEE JOO HO |
分类号 |
H01L41/09;H01L41/08;H01L41/18;H01L41/22;H01P11/00;H03H3/02;H03H3/04;H03H9/17;H03H9/54;H03H9/58;H03H9/60;(IPC1-7):H03H9/58 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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