| 摘要 |
<p>A method for introducing a gas to a treating apparatus equipped with a treating chamber having a treating space for subjecting an article to be treated to a predetermined treatment and a shower head portion having a plurality of separated and partitioned diffusion rooms for receiving a raw material gas or a reducing gas and diffusing and supplying the gas to the treating chamber, which further comprises a selection step of selecting, from combinations of the raw material gas, the reducing gas and the plurality of diffusion rooms, a combination wherein a pressure in the diffusion room for supplying the reducing gas and a pressure in the diffusion room for supplying the raw material gas show a greater difference, and a supplying step of supplying respective gases to respective diffusion rooms based on the combination selected in the selection step.</p> |
