发明名称 Baffle device
摘要 A baffle device applied to a reaction room for isolating a specific matter is provided. The baffle device includes a main body, a first collecting assemble disposed around the main body and having plural first outlets and plural first collecting strips disposed on the plural first outlets for collecting the specific matter, and a second collecting assembly parallel to the first collecting assembly and having plural second outlets and plural second collecting strips disposed on the specific matter, wherein the first collecting strips and the second collecting strips are mutually arranged alternately.
申请公布号 US2003217810(A1) 申请公布日期 2003.11.27
申请号 US20030404380 申请日期 2003.04.01
申请人 WINBOND ELECTRONIC CORP. 发明人 CHEN FU-SHENG;LI CHI-LU;CHANG CHING-TA
分类号 H01J37/32;H01L21/00;(IPC1-7):H01L21/306;C23C16/00 主分类号 H01J37/32
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