PIVOTING OPTICAL MICROMIRROR, ARRAY FOR SUCH MICROMIRRORS AND METHOD FOR MAKING SAME

摘要

The invention concerns a micromirror comprising a fixed part (31), a mobile part (41, 48) including reflecting means (48) and articulating means linking the mobile part to the fixed part. Said micromirror is characterised in that the articulating means are formed by a pivot (47) located beneath the mobile part between the latter and the fixed part and designed to enable the mobile part to move along axes of rotation contained in the mobile part and passing through an axis of the pivot, and wherein the fixed part comprises at least a cavity (36) opposite at least a zone of one end of the mobile part. The invention also concerns an array of pivoting micromirrors and a method for making such micromirrors. Said micromirrors are useful in optical routing or image projection systems.