| 摘要 |
<p>In a controller MC, information on a process room (PM) (last process PM) which conducted a process last for the previous lot is stored. When starting processing for the current lot, the semiconductor wafers W are loaded in process rooms, beginning with the process room next to the last process PM (for example, a process room (PM2) when the last process PM is a process room (PM1)). This allows the processors to be used evenly and minimizes variations in maintenance cycles and in the wearing of parts in the processors.</p> |
