SURFACE DEFECT JUDGING METHOD

摘要

A judging logic for judging the kind or class of a defect is automatically created in a short time, and the rate of concordance of the defect kind or class is improved. The specific solving means is as follows. The features of surface defects that have been collected and stored in the past are represented as points in a feature space. Under the restriction condition that there is an identification surface enabling perfect linear separation in a mapped space by using a virtual mapping function, an objective function of the distance to the point spaced from the identifying surface by the shortest distance. The identification surface maximizing the objective function and determined by solving a quadratic programming problem is previously defined as an identification function. The feature of a surface defect the kind of which is unknown is substituted into the identification function. From the results, the kind of the surface defect the kind of which is unknown is judged to be the defect kind or not.