发明名称 CONTINUOUS DISSOLVING DEVICE, CONTINUOUS DISSOLVING METHOD, AND GAS-DISSOLVED WATER SUPPLY
摘要 A continuous dissolving device having a dissolving unit for dissolving gas in a mainstream liquid is characterized by having a flowmeter for measuring the flow rate of the mainstream liquid and outputting a signal representing the measurement value and a flow-rate control mechanism for controlling the amount of supplied gas according to the signal inputted. A continuous dissolving method for continuously dissolving gas into a mainstream liquid is characterized in that the amount of supplied gas is controlled according to the flow rate of the mainstream liquid. With the device or method, it is possible to stably produce a solution with a constant concentration even if the flow rate of the mainstream liquid varies, thereby supplying a purified water or a surface-treatment water used for an electronic material needing an extremely precise, clean surface without waste.
申请公布号 WO03097223(A1) 申请公布日期 2003.11.27
申请号 WO2003JP03289 申请日期 2003.03.18
申请人 KURITA WATER INDUSTRIES LTD.;MORITA, HIROSHI;IDA, JUNICHI;TSUKAMOTO, KAZUMI 发明人 MORITA, HIROSHI;IDA, JUNICHI;TSUKAMOTO, KAZUMI
分类号 C02F1/00;B01F1/00;B01F3/04;B01F3/08;B01F15/00;B01F15/04;C02F1/68;H01L21/304;(IPC1-7):B01F1/00;C02F1/78 主分类号 C02F1/00
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