MICROMECHANICAL CAPACITIVE TRANSDUCER AND METHOD FOR PRODUCING THE SAME

摘要

The invention relates to a micromechanical capacitive transducer, in addition to a method for producing the same. Said transducer comprises a displaceable membrane (10) and an electrically conductive surface element (14) in a carrier layer (15). The electrically conductive surface element (14) is located opposite the membrane (10) above a cavity (12). The electrically conductive surface element (14) and the carrier layer (15) are pierced by perforations (20). The width of the openings of the perforations (20) corresponds approximately to the thickness of the carrier layer (15).