| 摘要 |
FIELD: nuclear engineering; smoothing-out surfaces of oxide materials. SUBSTANCE: proposed unit includes vacuum chamber where ion source, space charge compensator, target made from oxide material similar to material of backing and heater are arranged. Backing and target are in opposite position relative to ion source. Unit is also provided with ion separator consisting of external and internal current-conducting bell mouths which narrow over arcs of circular ion orbits and are located one in other at matching wide parts. Cross sections of bell mouths reduce from area of matching to opposite end of each bell mouth. Bell mouths are provided with longitudinal slots in plane of their symmetry. Separator is located is succession with space charge compensator. Target is mounted at end face of internal bell mouth. Backing is placed at end faces of narrow parts of internal and external bell mouths. Proposed unit makes it possible to sooth-out local sections of surfaces of oxide materials and apply belt-type and spot coats on backing. EFFECT: enhanced efficiency. 3 dwg |
