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发明名称
Festkörper-Bildaufnahmevorrichtung
摘要
申请公布号
DE69133197(T2)
申请公布日期
2003.11.27
申请号
DE19916033197T
申请日期
1991.11.26
申请人
NATIONAL SPACE DEVELOPMENT AGENCY OF JAPAN, TSUKUBA;MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
MASUDA, TAKESHI;YASHIRO, KIYOTAKA;TANGE, YOSHIO;MIYACHI, YUJI;SHIRAISHI, TADASHI
分类号
H01L21/339;H01L27/148;H01L29/762;H01L29/768;H04N5/335;H04N5/341;H04N5/369;H04N5/3728;(IPC1-7):H01L27/148
主分类号
H01L21/339
代理机构
代理人
主权项
地址
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