| 摘要 |
This is a method for manufacturing a comb teeth type piezoelectric actuator in which interlayer separation is hard to occur and even in case of comb teeth with slit width of 70 mu m and below, and also in case of comb teeth with slits of three-dimensional shape, it is easily manufactured. <??>A predetermined number of piezoelectric material green sheets 1 on which electrode films 2 are formed are prepared, and, by use of a punch 7 around which a stripper 9 is disposed and a die 8, slit apertures are formed in a first piezoelectric material green sheet 1a. The piezoelectric material green sheet 1a is pulled up by the stripper 9 without pulling up the punch 7 from the piezoelectric material green sheet 1a. Then, slit apertures are formed in a second piezoelectric material green sheet 1b by the punch 7, and in the same manner, without pulling up the punch 7 from the piezoelectric material green sheet 1b, two punched-out piezoelectric material green sheet 1a, 1b are pulled up by the stripper 9 and at the same time of the punch-out, the piezoelectric material green sheet is laminated. After repetition of this operation for a predetermined number of times, it is fired and integrated to form a comb teeth type piezoelectric actuator in which piezoelectric films are laminated. <IMAGE> |
