发明名称 Inspection method and device for active matrix
摘要 An object of inspection is an active matrix substrate including a plurality of pixels, each of the plurality of pixels being connected with one of a plurality of signal lines, one of a plurality of scanning lines, and one of a plurality of voltage supply lines, and including a pixel select transistor connected with the one signal line and the one scanning line and an operating transistor, a gate of the operating transistor being connected with the pixel select transistor, a drain of the operating transistor being connected with the one voltage supply line, and a source of the operating transistor being in an open state. This inspection method includes charging a parasitic capacitor between the gate and the drain of the operating transistor by supplying a potential from an inspection device, measuring discharge current from the parasitic capacitor by using the inspection device by discharging the parasitic capacitor, and determining whether or not a defect exists in each of the plurality of pixels by using the inspection device based on a value of the discharge current. <IMAGE>
申请公布号 EP1365632(A1) 申请公布日期 2003.11.26
申请号 EP20030011065 申请日期 2003.05.20
申请人 WINTEST CORPORATION 发明人 NARA, SHOJI;JIANG, HUI;YAMAMOTO, WATARU
分类号 G01R31/00;G09F9/00;G09F9/30;G09G3/00;G09G3/20;G09G3/30;G09G3/32;H01L27/32;H01L51/50;H05B33/08 主分类号 G01R31/00
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