发明名称 |
Dyed photoresists and methods and articles of manufacture comprising same |
摘要 |
<p>The present invention provides new photoresist compositions that comprise a resin binder, a photoactive component, particularly an acid generator, and a dye material that contains one or more chromophores that can reduce undesired reflections of exposure radiation. Preferred dye compounds are polymeric materials that include one or more chromophores such as anthracene and other polycyclic moieties that effectively absorb deep UV exposure radiation.</p> |
申请公布号 |
EP0834770(B1) |
申请公布日期 |
2003.11.26 |
申请号 |
EP19970115715 |
申请日期 |
1997.09.10 |
申请人 |
SHIPLEY COMPANY LLC |
发明人 |
MORI, JAMES MICHAEL;THACKERAY, JAMES, W.;SINTA, ROGER F.;BELL, ROSEMARY;MILLER-FAHEY, ROBIN L.;ADAMS, TIMOTHY G.;ZYDOWSKY, THOMAS M.;PAVELCHEK, EDWARD K.;DOCANTO, MANUEL |
分类号 |
C08F20/10;C08L33/06;C09B69/10;G03F7/004;G03F7/038;G03F7/039;G03F7/09;G03F7/30;H01L21/027;(IPC1-7):G03F7/09 |
主分类号 |
C08F20/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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