Process for producing semiconducting bodies with a layer sequence deposited by MOVPE,申请号EP20030012549-传众专利搜索

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发明名称	Process for producing semiconducting bodies with a layer sequence deposited by MOVPE
摘要
申请公布号	EP1347504(A3)	申请公布日期	2003.11.26
申请号	EP20030012549	申请日期	1997.08.13
申请人	OSRAM OPTO SEMICONDUCTORS GMBH	发明人	NIRSCHL, ERNST;SCHOENFELD, OLAF
分类号	H01L21/302;H01L21/301;H01L21/306;H01L21/3065;H01L21/78;H01L31/10;H01L33/00;H01L33/20;H01L33/22;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
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