HIGH TEMPERATURE SHORT TIME CURING OF LOW DIELECTRIC CONSTANT MATERIALS USING RAPID THERMAL PROCESSING TECHNIQUES,申请号EP20020715628-传众专利搜索

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发明名称	HIGH TEMPERATURE SHORT TIME CURING OF LOW DIELECTRIC CONSTANT MATERIALS USING RAPID THERMAL PROCESSING TECHNIQUES
摘要
申请公布号	EP1364397(A2)	申请公布日期	2003.11.26
申请号	EP20020715628	申请日期	2002.01.24
申请人	MATTSON THERMAL PRODUCTS INC.	发明人	SHARANGPANI, RAHUL;TAY, SING-PIN
分类号	H01L21/3105;H01L21/312;(IPC1-7):H01L21/310;B05D3/02	主分类号	H01L21/3105
代理机构		代理人
主权项
地址

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