发明名称 |
MICROPROTRUSION ARRAY AND METHODS OF MAKING A MICROPROTRUSION |
摘要 |
A microprotrusion array is formed from a silicon wafer by a plurality of sequential plasma and wet isotropic and anisotropic etching steps. The resulting microprotrusions have sharpened tips or cutting edges formed by a wet isotropic etch. |
申请公布号 |
EP1364396(A2) |
申请公布日期 |
2003.11.26 |
申请号 |
EP20020718901 |
申请日期 |
2002.02.05 |
申请人 |
BECTON, DICKINSON AND COMPANY |
发明人 |
EVANS, JOHN, D.;KELLER, CHRIS |
分类号 |
A61B5/15;A61M5/32;A61M35/00;A61M37/00;B61C1/00;B81B1/00;B81C1/00 |
主分类号 |
A61B5/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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