发明名称 MICROPROTRUSION ARRAY AND METHODS OF MAKING A MICROPROTRUSION
摘要 A microprotrusion array is formed from a silicon wafer by a plurality of sequential plasma and wet isotropic and anisotropic etching steps. The resulting microprotrusions have sharpened tips or cutting edges formed by a wet isotropic etch.
申请公布号 EP1364396(A2) 申请公布日期 2003.11.26
申请号 EP20020718901 申请日期 2002.02.05
申请人 BECTON, DICKINSON AND COMPANY 发明人 EVANS, JOHN, D.;KELLER, CHRIS
分类号 A61B5/15;A61M5/32;A61M35/00;A61M37/00;B61C1/00;B81B1/00;B81C1/00 主分类号 A61B5/15
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