发明名称 METHOD AND DEVICE FOR HIGH-SPEED INTERFERENTIAL MICROSCOPIC IMAGING OF AN OBJECT
摘要 A method and a device for interferential microscopic imaging of an object which comprises sending a light beam in each of the arms of a two-wave interferometer, one of the arms comprising the object to be analyzed. The phase is subjected to a sinusoidal modulation to a frequency f. The signal modulation results from mechanical oscillation of an assembly of elements of the interferometer. The interference signal (S) is integrated during the phase variation via a multichannel sensor. A computer enables to record the integrated interference signal obtained during each period fraction 1/n and to calculate, subsequently, the image of the object. The invention is potentially useful for characterizing thin layers, for controlling components in microelectronics, for reading data stored in volume (3D) and objects unstable in time; in biology and in vivo studies.
申请公布号 EP1364181(A1) 申请公布日期 2003.11.26
申请号 EP20010996716 申请日期 2001.11.15
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE 发明人 DUBOIS, ARNAUD;BOCCARA, CLAUDE
分类号 G01B9/02;G01B9/04;G02B21/00;(IPC1-7):G01B9/02 主分类号 G01B9/02
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