| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement fine adjustment device and a displacement fine adjustment method for enhancing the elastic displacement of a pair of elastic members, furthermore, the moving accuracy of a moving part by eliminating the occurrence of buckling in a driving plate constituting a driving means. SOLUTION: This displacement fine adjustment device has the pair of oppositely arranged elastic members 1, a fixing part 3 to which one-side ends of the pair of elastic members 1 are connected, the moving part 5 for connecting the other-side ends of the pair of elastic members 1 connected to the fixing part via a beam member, and finely displaceable via the beam member by the elastic deformation of the pair of elastic members 1, and the driving means 9 for finely displacing the moving part by elastically deforming the pair of elastic members 1. The driving means 9 finely displaces the moving part 5 by pulling the pair of elastic members 1 to the mutually approaching direction. COPYRIGHT: (C)2004,JPO
|
